Epitaxial Equipment : MBE Systems

The GEN10™ is an ultra flexible MBE system for materials research, integrating designs from Veeco's industry-leading family of cluster tool MBE systems. With the ability to grow 1", 2" or 3" wafers, this system is an automated and upgradeable R&D system capable of processing devices with incompatible materials.

This new model, on our proven modular cluster tool platform allows for easy maintenance and offers an economical upgrade path to add growth modules over time, up to a maximum of three.

The application specific design and multiple growth modules of the GEN10 provide the flexibility for incompatible material processing, for a range of applications such as nitrides or oxides, or allow multiple research projects to be performed simultaneously, for a lower overall capital cost.

Because this system is built upon a similar architecture as our production systems, the processes are easily scaled to our larger systems. The GEN10's design architecture and options make it the ideal choice for today's challenging devices.