Metrology & Instrumentation
Process Equipment
Epitaxial Equipment
Process Equipment : Ion Sources
Gridded DC Ion Sources
Veeco’s DC ion sources come in either circular or linear geometries and are easy to install, clean and maintain. These ion sources produce, broad, uniform, monoenergetic ion beams that are used in a variety of research and production applications, most of which involve surface modification, such as etching and deposition. DC sources are ideal for operation in inert environments or very short duration operation in oxidizing environments. Veeco offers the following DC Ion Sources: 3cm DC; 5cm DC; 8cm DC; 11cm DC; 12cm DC; 15cm DC; 21cm DC; 6 x30cm DC; 6 x 40cm DC; and 6 x 50cm DC.
3cm DC (ITI) Ion Source
Compact, economical ion source for cleaning, etching, texturing and sputtering, or enhanced deposition for smaller geometric vacuum systems.
Compact, economical ion source for cleaning, etching, texturing and sputtering, or enhanced deposition for smaller geometric vacuum systems.
3cm DC (CSC) Ion Source
Compact, economical ion source for cleaning, etching, texturing and sputtering, or enhanced deposition.
Compact, economical ion source for cleaning, etching, texturing and sputtering, or enhanced deposition.
5cm DC Ion Source
Small, economical ion source for applications ranging from cleaning or ion beam assisted/enhanced deposition applications, through etching, and deposition processes.
Small, economical ion source for applications ranging from cleaning or ion beam assisted/enhanced deposition applications, through etching, and deposition processes.
8cm DC Ion Source 
Mid-size, economical ion source ideal for a variety of applications ranging from cleaning to etching.
Mid-size, economical ion source ideal for a variety of applications ranging from cleaning to etching.
11cm DC Ion Source
Ion source for cleaning and etching applications, also ideal for ion beam sputter deposition, diamond-like coatings (DLC) or as an assist source at low energy operation.
Ion source for cleaning and etching applications, also ideal for ion beam sputter deposition, diamond-like coatings (DLC) or as an assist source at low energy operation.
12cm DC Ion Source
Ion source for applications such as cleaning or ion beam assisted/enhanced deposition applications through etching and deposition.
Ion source for applications such as cleaning or ion beam assisted/enhanced deposition applications through etching and deposition.
15cm DC Ion Source
The 15cm DC ion beam source provides a wide range of stable operating conditions for medium sized substrate applications.
The 15cm DC ion beam source provides a wide range of stable operating conditions for medium sized substrate applications.
21cm DC Ion Source
The 21cm DC ion beam source provides a wide range of stable operating conditions for large substrate applications.
The 21cm DC ion beam source provides a wide range of stable operating conditions for large substrate applications.
2.5cm x 22cm DC Ion Source
Veeco's linear DC Ion Sources feature the same innovative design, quality and reliability as the round sources but are designed for processes that incorporate large/wide individual substrates or large substrate batches loaded on linear or cylindrical fixturing.
Veeco's linear DC Ion Sources feature the same innovative design, quality and reliability as the round sources but are designed for processes that incorporate large/wide individual substrates or large substrate batches loaded on linear or cylindrical fixturing.
6cm x 30cm DC Ion Source
Veeco's linear DC Ion Sources feature the same innovative design, quality and reliability as the round sources but are designed for processes that incorporate large/wide individual substrates or large substrate batches loaded on linear or cylindrical fixturing.
Veeco's linear DC Ion Sources feature the same innovative design, quality and reliability as the round sources but are designed for processes that incorporate large/wide individual substrates or large substrate batches loaded on linear or cylindrical fixturing.
6cm x 40cm DC Ion Source
Veeco's linear DC Ion Sources feature the same innovative design, quality and reliability as the round sources but are designed for processes that incorporate large/wide individual substrates or large substrate batches loaded on linear or cylindrical fixturing.
Veeco's linear DC Ion Sources feature the same innovative design, quality and reliability as the round sources but are designed for processes that incorporate large/wide individual substrates or large substrate batches loaded on linear or cylindrical fixturing.
6cm x 50cm DC Ion Source
Veeco's linear DC Ion Sources feature the same innovative design, quality and reliability as the round sources but are designed for processes that incorporate large/wide individual substrates or large substrate batches loaded on linear or cylindrical fixturing.
Veeco's linear DC Ion Sources feature the same innovative design, quality and reliability as the round sources but are designed for processes that incorporate large/wide individual substrates or large substrate batches loaded on linear or cylindrical fixturing.
MPS3000 Power Supply
Providing a fully integrated power supply solution for small DC ion sources, the MPS 3000 is the industry leader in value.
Providing a fully integrated power supply solution for small DC ion sources, the MPS 3000 is the industry leader in value.
MPS5001 Power Supply
Fully Integrated DC Ion Source Power Supply System Ideal for Large Production and Research Ion Sources.
Fully Integrated DC Ion Source Power Supply System Ideal for Large Production and Research Ion Sources.